solutions manual Micro and Smart Systems Ananthasuresh Vinoy Gopalakrishnan Aatre
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Table of Contents
Chapter 2 Micro Sensors, Actuators, Systems And Smart Materials: An Overview
Chapter 3 Micromachining Technologies
Chapter 4 Mechanics Of Slender Solids In Microsystems
Chapter 5 Finite Element Method
Chapter 6 Modeling Of Coupled Electromechanical Systems
Chapter 7 Electronics Circuits And Control For Micro And Smart Systems
Chapter 8 Integration Of Micro And Smart Systems
Chapter 9 Scaling Effects In Microsystems
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